| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a minute tilt structure.SOLUTION: A method for manufacturing a tilt structure includes the steps of: forming a shaft section 13b on a substrate section 13a; forming a sacrificial film, from which an upper surface of the shaft section is exposed, and which has an upper surface connected to the upper surface of the shaft section, on the substrate section 13a; forming a tilt structure film 7 to the upper surface of the shaft section and the upper surface of the sacrificial film; forming a thin film section 11 located on a corner section composed of the upper surface of the shaft section and a side surface of the shaft section to the tilt structure film by processing the tilt structure film 7 located on the corner section so as to have thin film thickness; removing the sacrificial film between the tilt structure film 7 and the substrate section 13a; supplying a space between the tilt structure film and the substrate section with fluid 18; removing the fluid 18 to generate sticking, thereby to bend the tilt structure film in the thin film section 11; and bonding an end of the tilt structure film to the substrate section thereby to form an acute angle by the substrate section and the tilt structure film. |
