| 摘要 |
In a two-dimensional optical deflector including: a mirror (1); two first torsion bars (2a, 2b) coupled to the mirror (1) along a first axis; an inner frame (3) surrounding the mirror (1); two piezoelectric actuators (4a, 4b) each coupled between the first torsion bars (2a, 2b) and supported by the inner frame (3); an outer frame (5) surrounding the inner frame (3); and two second torsion bars (6a, 6b) coupled between the inner frame (3) and the outer frame (5) along a second axis; a first permanent magnet layer (7a, 7a') formed on at least a part of a rear-side surface of the inner frame (3). A base (10B, 10B') supports the outer frame (5). A coil (8, 8a, 8b) is formed at the base (10B, 10B'). A magnetic flux (Bc, Bca) generated from the coil (8, 8a) interacts with a magnetic flux (Ba) of the first permanent magnetic layer (7a, 7a'). |
