发明名称 |
薄膜蒸着用マスクフレーム組立体及びその製造方法 |
摘要 |
A mask frame assembly using a plurality of stick-shaped split masks. The mask frame assembly includes a plurality of split masks, each of which includes a deposition pattern corresponding to a unit screen. Each of the split masks is formed of a plurality of partial masks to form the deposition pattern corresponding to a unit screen. Accordingly, the split masks accommodating a pattern corresponding to a large screen may be easily manufactured without an increase in the amount of etching errors. |
申请公布号 |
JP5912416(B2) |
申请公布日期 |
2016.04.27 |
申请号 |
JP20110237373 |
申请日期 |
2011.10.28 |
申请人 |
三星ディスプレイ株式會社Samsung Display Co.,Ltd. |
发明人 |
申 義 信;朴 宰 ▲せき▼;▲そう▼ 永 根;金 ▲かん▼ 冬;金 圭 範;許 ▲てい▼ 宇 |
分类号 |
C23C14/24;C23C14/04;H01L51/50;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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