| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a formation method of a resist film, capable of uniformly forming the resist film at a low cost. <P>SOLUTION: The formation method of the resist film, for forming the resist film on a workpiece 3 by electrostatic spraying, includes: a step of applying a prescribed voltage between a nozzle 2 and the workpiece 3 and spraying resist liquid from the nozzle 2 to the workpiece 3; and a step of curing the resist liquid sprayed onto the workpiece 3 and forming the resist film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
