发明名称 熱伝導シートの製造方法、熱伝導シート、金属箔付き熱伝導シート及び半導体装置
摘要 Provided is a method for manufacturing a thermally conductive sheet containing a plurality of joined films, comprising the following: a step wherein at least a first attached-substrate film and a second attached-substrate film, each comprising a substrate and a film containing thermally conductive particles and thermosetting resin disposed on the substrate, are prepared; a step wherein the films of the first attached-substrate film and the second attached-substrate film are brought into contact with each other and placed between a first roll and a second roll that are disposed in opposition to each other and form a pair; a step wherein the first roll and the second roll that form the pair are rotated, applying pressure in the thickness direction of the films; and a step wherein the first attached-substrate film and the second attached-substrate film are overlaid and conveyed.
申请公布号 JP5910731(B2) 申请公布日期 2016.04.27
申请号 JP20140508216 申请日期 2013.03.29
申请人 日立化成株式会社 发明人 阿波野 康彦;西山 智雄;片木 秀行;白坂 敏明;福田 和真;桑野 敦司;五十幡 貴弘
分类号 H01L23/36 主分类号 H01L23/36
代理机构 代理人
主权项
地址