发明名称 半導体装置、及び、半導体装置の作製方法
摘要 An object is to suppress deterioration in electric characteristics in a transistor including an oxide semiconductor layer or a semiconductor device including the transistor. In a transistor in which a channel layer is formed using an oxide semiconductor, a silicon layer is provided in contact with a surface of the oxide semiconductor layer, an impurity semiconductor layer is provided over the silicon layer, and a source electrode layer and a drain electrode layer are provided to be electrically connected to the impurity semiconductor layer.
申请公布号 JP5913473(B2) 申请公布日期 2016.04.27
申请号 JP20140156336 申请日期 2014.07.31
申请人 株式会社半導体エネルギー研究所 发明人 坂田 淳一郎;郷戸 宏充;島津 貴志
分类号 H01L21/336;G09F9/30;H01L29/786;H01L51/50;H05B33/14 主分类号 H01L21/336
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