Substrate inverting apparatus and substrate processing apparatus

摘要

Provided is a technique which can properly invert a plurality of substrates at a time. To achieve this object, a substrate inverting apparatus includes: a support mechanism which supports a plurality of substrates in a state where the substrates are stacked vertically in a spaced-apart manner in a horizontal posture; and a clamping and inverting mechanism which clamps the plurality of substrates supported by the support mechanism respectively and inverts the plurality of substrates at a time. In the support mechanism, support members which support the substrate are moved to a standby position from a support position while being moved downward away from the center of the substrate as viewed in the vertical direction. On the other hand, in the clamping and inverting mechanism, clamping members which clamp the substrate are moved to a near position from a remote position by a clamping member drive part and are elastically biased by an elastic member toward side surfaces of the substrate at the near position.

主权项

1. A substrate inverting apparatus for inverting a substrate, the substrate inverting apparatus comprising:
a support mechanism which supports a plurality of substrates in a state where the substrates are stacked vertically in a spaced-apart manner in a horizontal posture; and a clamping and inverting mechanism which clamps said plurality of substrates supported by said support mechanism respectively and inverts said plurality of substrates at a time, wherein said clamping and inverting mechanism comprises: a pair of clamping members which clamps each one of said plurality of substrates from both edge portions; a clamping member drive part which moves said pair of respective clamping members between a near position where a part of the clamping members is arranged close to or is brought into contact with a side surface of the substrate, and a remote position where said clamping members are away from said side surface; and an elastic member which elastically biases said clamping members arranged at said near position toward the side surface of said substrate, said support mechanism comprises: a plurality of support members which support said plurality of respective substrates from a lower surface side thereof; and a support member drive part which moves said plurality of respective support members between a support position where a part of the support member is brought into contact with a lower surface of the substrate, and a standby position where said support member is away from said lower surface, and said support member drive part moves the support member to said standby position from said support position by moving said plurality of respective support members downward while moving said support members away from the center of said substrate as viewed in the vertical direction.