Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor

摘要

According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.

主权项

1. A pressure sensor, comprising:
a base; and a sensor unit provided on the base, the sensor unit including:
a transducing thin film having a first surface and being flexible;a first strain sensing element provided on the first surface; anda second strain sensing element provided on the first surface and separated from the first strain sensing element, the first strain sensing element including:
a first magnetic layer having a first magnetization being changeable;a first film including oxygen at a first oxygen concentration;a second magnetic layer provided between the first magnetic layer and the first film, the second magnetic layer having a second magnetization being fixed; anda first intermediate layer provided between the first magnetic layer and the second magnetic layer, the second strain sensing element including:
a third magnetic layer having a third magnetization being changeable;a second film having a second oxygen concentration different from the first oxygen concentration;a fourth magnetic layer provided between the third magnetic layer and the second film, the fourth magnetic layer having a fourth magnetization being fixed direction; anda second intermediate layer provided between the third magnetic layer and the fourth magnetic layer.