发明名称 Image sensor device with light blocking structure
摘要 The disclosure provides an image sensor device and a manufacturing method. The image sensor device includes a semiconductor substrate and a light sensing region in the semiconductor substrate. The image sensor device also includes a light blocking structure in the semiconductor substrate and adjacent to the light sensing region. A sidewall of the light blocking structure is a curved surface.
申请公布号 US9324752(B2) 申请公布日期 2016.04.26
申请号 US201414192322 申请日期 2014.02.27
申请人 Taiwan Semiconductor Manufacturing Co., Ltd. 发明人 Chien Volume;Lin Kun-Huei;Wei Chia-Yu;Tseng Allen;Jeng Chi-Cherng;Liu Chuan-Pu
分类号 H01L27/148;H01L27/146 主分类号 H01L27/148
代理机构 Birch, Stewart, Kolasch & Birch, LLP 代理人 Birch, Stewart, Kolasch & Birch, LLP
主权项 1. An image sensor device, comprising: a semiconductor substrate; a light sensing region in the semiconductor substrate; and a light blocking structure in the semiconductor substrate and adjacent to the light sensing region, wherein a sidewall of the light blocking structure in a cross-sectional view of the image sensor is a curved surface, wherein the cross-sectional view of the image sensor is taken along an imaginary plane parallel to a normal direction of a top surface of the semiconductor substrate.
地址 Hsin-Chu TW