Pattern formation method, stamper manufacturing method, and magnetic recording medium manufacturing method

摘要

According to one embodiment, a pattern formation method includes steps of forming a layer to be processed on a substrate, forming a metal microparticle layer by coating the layer to be processed with a metal microparticle coating solution containing metal microparticles and a solvent, reducing a protective group amount around the metal microparticles by first etching, forming a protective layer by exposing the substrate to a gas containing C and F and adsorbing the gas around the metal microparticles to obtain a projection pattern, and transferring the projection pattern to the layer to be processed by second etching.

主权项

1. A pattern formation method, comprising:
forming a layer to be processed on a substrate; forming a metal microparticle layer by coating the layer to be processed with a metal microparticle coating solution comprising metal microparticles and a solvent; reducing a protective group amount around the metal microparticles by first etching; after the reducing the protective group, exposing the substrate and the metal microparticles to a gas comprising carbon and fluorine to form a protective layer, to adsorb the gas around the metal microparticles to substitute the gas for the protective group, and to obtain a projection pattern; and transferring the projection pattern to the layer to be processed by second etching.