发明名称 反射屈折光学系
摘要 An optical system to form an image on an image plane includes, a catadioptric optical subsystem configured to collect light from an object plane; and a refractive optical subsystem configured to form the image on the image plane, the catadioptric and refractive optical subsystems being arranged in order from the object plane to the image plane along an optical axis of the optical system. A baffle to shut off light traveling toward the image plane without being reflected by the catadioptric optical subsystem is placed in the optical system, in order to form a shielded portion in a center of an exit pupil plane of the optical system, and the catadioptric optical subsystem includes a partially transparent surface around the optical axis of the optical system so that transmissivity of a region, other than the shielded portion, at the exit pupil plane varies in a radial direction of the exit pupil plane.
申请公布号 JP5909548(B2) 申请公布日期 2016.04.26
申请号 JP20140514903 申请日期 2012.06.08
申请人 キヤノン株式会社;アリゾナ ボード オブ リージェンツ オン ビハーフ オブ ザ ユニバーシティー オブ アリゾナArizona Board of Regents on behalf of the University of Arizona 发明人 中野 正嗣;サシアン−アルバラド, ジョセ マニュエル
分类号 G02B17/08;G02B13/18;G02B21/02;H01L21/027 主分类号 G02B17/08
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