Process for producing 3-dimensional structure assembled from nanoparticles

摘要

The present invention relates to a process for producing a 3-dimensional structure assembled from nanoparticles by using a mask having a pattern of perforations, which comprises the steps of: in a grounded reactor, placing a mask having a pattern of perforations corresponding to a determined pattern at a certain distance above a substrate to be patterned, and then applying voltage to the substrate to form an electrodynamic focusing lens; and introducing charged nanoparticles into the reactor, the charged particles being guided to the substrate through the pattern of perforations so as to be selectively attached to the substrate with 3-dimensional shape. According to the process of the present invention, a 3-dimensional structure of various shapes can be produced without producing noise pattern, with high accuracy and high efficiency.

主权项

1. A process for producing a structure assembled from nanoparticles comprising the steps of:
(i) in a grounded reactor, placing a mask having a pattern of perforations with a width (w) corresponding to a predetermined pattern at a certain distance (d) above a substrate to be patterned, with the mask being nonconductive and having an electrode or ion layer on one or both sides, and then applying voltage to the substrate or the mask to form an electrodynamic focusing lens; and (ii) introducing charged nanoparticles into the reactor, with the charged particles guided to the substrate through the pattern of perforations so as to be focused and attached to the substrate wherein the shape of 3-dimensional structures is changed by changing focusing level of the charged particles through controlling the charge or voltage by using a voltage and current supplying device, a battery or a storage battery.