Sensor with vacuum-sealed cavity

摘要

A method and apparatus for detecting underwater sounds is disclosed. An embodiment of the apparatus includes a substrate with a vacuum-sealed cavity. A support structure and an acoustic pressure sensor are situated on the substrate. The support structure of the apparatus may include a first oxide layer situated on the substrate, a silicon layer situated on the first oxide layer, and a second oxide layer situated on the silicon layer. The acoustic pressure sensor of the apparatus includes a first electrode layer situated on the substrate, a piezoelectric layer situated on the first electrode layer, and a second electrode layer situated on the piezoelectric layer. In one embodiment, the surface area of the second electrode layer is between about 70 to 90 percent of the surface area of the piezoelectric layer. In various embodiments, the support structure is thicker than the piezoelectric layer.

主权项

1. An apparatus, comprising:
a substrate that includes a vacuum-sealed cavity; a support structure situated on the substrate; and an acoustic pressure sensor situated on the support structure; wherein the support structure includes:
a first dielectric layer situated on the substrate;a silicon layer situated on the first dielectric layer; anda second dielectric layer situated on the silicon layer.