| 摘要 |
The present invention relates to a manufacturing method of a porous polishing pad including a window and a carbon dioxide pore generated by a reaction between a prepolymer and a hydrophilic polymer material, and to a porous polishing pad manufacture by the manufacturing method. The method includes the following steps: positioning a transparent polymer resin block at a portion of a cast; injecting the prepolymer into the cast; adding the hydrophilic polymer material in the form of a powder on the prepolymer; and forming the pore within the prepolymer by generating carbon dioxide by the reaction between the polymer and the hydrophilic polymer material. Moisture content of the hydrophilic polymer powder is 0.05 to 10%. |
