| 摘要 |
The present invention relates to a producing method of substrate growth graphene, the substrate growth graphene, and an electronic component comprising the same. The producing method of substrate growth graphene comprises an (a) step of providing a metal layer on a substrate; a (b) step of supplying etching gas and carbon-containing gas, and performing metal organic chemical vapor deposition (MOCVD); a (c) step of growing graphene on the metal layer; and a (d) step of growing graphene on the substrate in a state which does not contain the metal layer by removing all metals of the metal layer due to the etching gas, while performing continuous MOCVD in the (c) step. |
