Wireless MEMS sensor and method of reading the same

摘要

This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.

主权项

1. A wireless sensor, comprising a MEMS resonator and an antenna directly matched thereto, the wireless sensor adapted to emit electromagnetic signal at an intermodulation frequency when illuminated by electromagnetic energy at first and second frequencies,
wherein at least one of the first and second frequencies is swept in order to measure a MEMS parameter of the MEMS resonator, the MEMS parameter including one of: a mechanical quality factor, a mechanical resonance frequency or an electrical resonance frequency.