Probe card for power device

摘要

A probe card 10 includes a first probe 11 configured to come into electric contact with an emitter electrode of a power device D; a block-shaped first connecting terminal 12 to which the first probe 11 is connected; a second probe 13 configured to come into electric contact with a gate electrode of the power device D; a block-shaped second connecting terminal 14 to which the second probe 13 is connected; a contact plate 15 configured to come into electric contact with a collector electrode of the power device D; and a block-shaped third connecting terminal 16 fixed to the contact plate 15. Further, the first connecting terminal 12, the second connecting terminal 14 and the third connecting terminal 16 electrically come into direct contact with corresponding connection terminals of a tester, respectively.

主权项

1. A probe card that inspects a dynamic characteristic of a plurality of power devices formed on a semiconductor wafer, the probe card comprising:
a first probe configured to come into electric contact with an emitter electrode of the power device; a block-shaped first connecting terminal to which the first probe is connected; a second probe configured to come into electric contact with a gate electrode of the power device; a block-shaped second connecting terminal to which the second probe is connected; a contact plate configured to come into electric contact with a collector electrode of the power device; a supporting board to which the first connecting terminal and the second connecting terminal are fixed; and a block-shaped third connecting terminal fixed to the contact plate, wherein the first connecting terminal and the second connecting terminal are inserted through the supporting board and exposed from two opposite surfaces of the supporting board, and the third connecting terminal is inserted through a hole formed in the supporting board.