Method and apparatus of operating a scanning probe microscope

摘要

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.

主权项

1. A method of operating a scanning probe microscope (SPM) comprising:
generating relative motion between a probe and a sample, detecting motion of the probe; determining, from the detected probe motion, a probe deflection based on a probe-sample interaction, the probe deflection being substantially independent of parasitic probe deflection, wherein the parasitic probe deflection is caused by the background associated with operation of the SPM, and wherein the determining step includes subtracting the background from the detected probe motion by using a digital controller; and controlling the SPM in real time using the determining step; and wherein an amplitude of a probe-sample interaction is less than an amplitude of the parasitic probe deflection.