发明名称 薄板部材移載装置
摘要 Provided is a thin board member transfer apparatus, which can reliably hold and transfer thin board members, even if the thin board members are stored at small intervals in a storing member. A thin board member transfer apparatus (1) transfers, to a second storing member (8), a plurality of thin board members (3) which are arranged at predetermined intervals and stored in a first storing member (5). The thin board member transfer apparatus (1) is provided with: holding/transferring members (10, 20), which respectively have a plurality of holders (11, 21), and which respectively hold and transfer, at one time, the thin board members (3) at predetermined intervals; a first plunging member (50),which plunges up every predetermined number of thin board members (3) so as to transfer the thin board members (3) between the first storing member (5) and the holding/transferring members (10, 20), said thin board members being stored in the first storing member; and a second plunging member (60), which transfers the thin board members (3) between the holding/transferring members (10, 20) and the second storing member (8).
申请公布号 JP5909354(B2) 申请公布日期 2016.04.26
申请号 JP20110275248 申请日期 2011.12.16
申请人 株式会社フラスコ 发明人 藤原 弘一;藤原 賢司
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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