High frequency uniform droplet maker and method

摘要

There is disclosed a piezoelectric droplet maker that is driven at high frequency and energized with high power and high frequency Operational Amplifier (OP-AMP) electronics. The droplet maker implements a method of producing jets of uniform droplets of solution precursors (or any other homogeneous liquids). The formation of droplets results from stream break up due to the disturbance of liquid jets by the piezo actuator as they leave an orifice. This disturbance can be electronically tuned to produce uniform droplets with high repeatability. In another aspect, the droplet maker can be used to inject axially uniform diameter solution precursor droplets into process gas flow of a microwave plasma apparatus.

主权项

1. A system for producing droplet streams having droplets with uniform diameter, the system comprising:
a solution dispenser in fluid communication with a fluid reservoir in a fluid reservoir vessel and disposed to maintain the fluid reservoir filled with fluid and under pressure via a channel running substantially parallel to a main axis of the fluid reservoir in the direction of one or more capillary nozzles; a separation membrane defining a first end of the fluid reservoir and in contact with the fluid on one side of the separation membrane; a piezo actuator in contact with the separation membrane on a side opposite that in contact with the fluid; and the one or more capillary nozzles disposed at a second end of the fluid reservoir away from the separation membrane, the fluid within the fluid reservoir contacting both the separation membrane and the one or more capillary nozzles, wherein the one or more capillary nozzles receive fluid from the fluid reservoir and eject a droplet stream from the capillary nozzle.