| 发明名称 | Method of manufacturing a MEMS micro-mirror assembly | ||
| 摘要 | According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly (250), comprising the step of mounting a PCB board (205) on a metallic plate (206), mounting a MEMS device (240) on the PCB board (205), wherein the MEMS device (240) comprises a MEMS die (241) and a magnet (230). | ||
| 申请公布号 | US9323047(B2) | 申请公布日期 | 2016.04.26 |
| 申请号 | US201314382734 | 申请日期 | 2013.02.21 |
| 申请人 | INTEL CORPORATION | 发明人 | Khechana Faouzi;Abele Nicolas |
| 分类号 | G02B26/08;B81C3/00;H05K1/18;H05K3/32;B81C1/00;G02B7/182;G02B26/10;H05K1/11 | 主分类号 | G02B26/08 |
| 代理机构 | Kacvinsky Daisak Bluni PLLC | 代理人 | Kacvinsky Daisak Bluni PLLC |
| 主权项 | 1. A method of manufacturing a MEMS micro mirror assembly, comprising the steps of: mounting a PCB board on a metallic plate; mounting a MEMS device on the PCB board, wherein the MEMS device comprises a MEMS die and a magnet; mounting an alignment mask on the PCB board, wherein the alignment mask comprises a grid; using the grid of the alignment mask to position one or more MEMS devices on the PCB board when mounting the one or more MEMS devices on the PCB board; wherein the step of using the grid of the alignment mask to position one or more MEMS devices on the PCB board comprises, positioning a single MEMS device in one or more apertures defined in the grid, and arranging the or each MEMS device so that at least a first and second side of the or each MEMS device contacts the grid. | ||
| 地址 | Santa Clara CA US | ||