FILM GIG APPARATUS USING IN THIN FILM DEPOSITION

摘要

According to one embodiment, a film jig apparatus for depositing a thin film comprises: an upper block arranged on an upper side of a film for depositing a thin film to pressurize an edge portion of the film to a lower side; a lower block arranged on a lower side of the film to pressurize the edge portion of the film to an upper side; a frame wherein the lower block is coupled to move in a horizontal direction at a predetermined distance, and a first hollow portion is formed; and a heating unit detachably provided in the first hollow portion, and heating the film by facing the film positioned on an upper side.