| 摘要 |
This invention provides a laser processing apparatus 100 of a lens unit 20 used in a f &thgr; lens 5, wherein the lens unit 20 uses a temperature detector 14 to measure a temperature change of optical lenses 11a and 11b caused by the instantaneous absorption of high energy laser beam 2. A plurality of temperature detectors 14 are arranged in a laser beam non-irradiated part 16 of optical lenses 11a and 11b, and a controlling apparatus 9 is used to correct the converging point position of the laser beam 2 according to a temperature signal measured by the temperature detector 14. |
