发明名称 半導体装置の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a p-type group III nitride semiconductor exhibiting a lower resistance p-type characteristic than a conventional p-type semiconductor composed of a p-type group III nitride semiconductor superlattice, and having a desired refractive index and a band gap.SOLUTION: A p-type group III nitride semiconductor is a p-type group III nitride semiconductor 23 composed of a superlattice structure of an InAlGaN layer and a p-type InAlGaN layer which are epitaxially grown on a laminate structure with a low-temperature GaN buffer layer 21 and a GaN layer 22 sequentially laminated on a sapphire substrate 20.
申请公布号 JP5907210(B2) 申请公布日期 2016.04.26
申请号 JP20140107954 申请日期 2014.05.26
申请人 株式会社リコー 发明人 岩田 浩和
分类号 H01S5/042;H01L31/10;H01L33/04;H01L33/14;H01L33/32;H01L33/38;H01S5/343 主分类号 H01S5/042
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