| 摘要 |
PROBLEM TO BE SOLVED: To obtain a highly reliable terminal connection structure, a heating apparatus, and an electrostatic chuck device.SOLUTION: A terminal connection structure includes a strip wiring, and a connection terminal arranged at an end of the wiring, and provided with an opposite surface facing the terminal. The connection terminal is provided with a plurality of through holes reaching the opposite surface, and a weld zone is formed by laser welding on the interface of the opposite surface side opening of the through hole, and the end. The opposite surface is circular, and the through holes may be holes elongated in the radial direction of the opposite surface and arranged on a virtual circle concentric thereto.SELECTED DRAWING: Figure 4 |
