发明名称 COATING APPLICATOR
摘要 PROBLEM TO BE SOLVED: To provide a coating applicator which allows for easy liquid shortage adjustment, even if a filter exists between a nozzle and an on-off valve.SOLUTION: In a coating applicator, an on-off valve 35 has a motor 66 capable of adjusting the opening operation and closing operation based on an electric signal given from a control section 51. A suck-back valve 47 includes a motor 76 capable of adjusting the amount of capacity change of a flow path 74 for suck-back communicating with the upstream and downstream of piping based on an electric signal. Since the control section 51 can adjust the start of closing operation of the on-off valve 35 and suction operation of the suck-back valve 47 by giving an electric signal to the motors 66, 76, liquid shortage adjustment can be performed easily.SELECTED DRAWING: Figure 3
申请公布号 JP2016063205(A) 申请公布日期 2016.04.25
申请号 JP20140192801 申请日期 2014.09.22
申请人 SCREEN HOLDINGS CO LTD 发明人 IMAMURA MASATAKA;MORIOKA KAZUO
分类号 H01L21/027;B05C11/08;B05C11/10 主分类号 H01L21/027
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