| 摘要 |
PURPOSE: To provide a beam position measurement method of a multi-charged particle beam capable of shortening the measurement time of the beam position of a multi-beam, while satisfying required measurement accuracy and required dimensional accuracy.CONSTITUTION: A beam position measurement method of a multi-charged particle beam includes a step for acquiring the number of beams required for the measurement reproducibility of the amperage in a multi-charged particle beam to fall within an allowable value, a step for setting a plurality of measurement points depending on a desired dimensional accuracy value, in an irradiation area irradiate with the entire multi-charged particle beam, a step for setting a beam area including a measurement point by a plurality of beams, out of the multi-charged particle beam, for each of the plurality of measurement points, and a step for measuring the position of the measurement point by using a plurality of beams of a corresponding beam area, for each measurement point.SELECTED DRAWING: Figure 5 |
