| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor inspection device and an inspection method therefor with which it is possible to inspect a specific cyclic fluctuation included in the output characteristic of a displacement sensor at low cost.SOLUTION: The present invention is the inspection device 100 of a displacement sensor 1 for inspecting a cyclic fluctuation included in the output characteristic of the displacement sensor 1, the inspection device 100 comprising: a sequence data acquisition unit S1 for applying a continuously changing input with a certain time gradient to the displacement sensor 1 and acquiring the sequence data of output values; a difference arithmetic unit S2 for performing arithmetic on a post-difference sequence data in which a difference between a value at some point in the sequence data and a value at a point advanced by a prescribed evaluation pitch from the point is obtained for each point in the sequence data; moving average arithmetic units S3, S4 for performing arithmetic on post-moving average sequence data in which the moving average of a prescribed number of pieces of data centering on the point at which the post-difference sequence data exists is obtained for each point in the post-difference sequence data; and a determination unit S6 for determining that the displacement sensor is normal when a difference between the maximum value and minimum value of the amplitude of the output value of the post-moving average sequence data is smaller than a normality determination threshold.SELECTED DRAWING: Figure 2 |
