| 摘要 |
PROBLEM TO BE SOLVED: To detect an unjoined part in the joint of a nanoimprinting assembly, easily and reliably.SOLUTION: An inspection device of a nanoimprinting assembly includes a substrate holding section 12 for holding a nanoimprinting substrate 1 having a thin plate 2 and a frame 3, a light projecting section 13a for irradiating the nanoimprinting substrate 1 with light, and a light-receiving section 13b for receiving the light reflecting on a joint 5 between the thin plate 2 and frame 3. A signal is sent from the light-receiving section 13b to a detector 14 where the optical characteristics of the joint 5 are detected, and then a judgement is made in a judgement section 15 whether an unjoined part 9 is present or absent.SELECTED DRAWING: Figure 1 |
