| 摘要 |
PROBLEM TO BE SOLVED: To achieve a highly efficient semiconductor light-receiving element capable of on-chip integration simultaneously with a micro ring LD, and the like, while reducing reflection return light.SOLUTION: A semiconductor light-receiving element includes a light-receiving part formed on a substrate, with a semiconductor multilayer structure of circular outer shape, a tapered light input part provided while extending a part of the periphery of a semiconductor multilayer structure in the circumferential direction, and a silicon wire waveguide for coupling the light to the light input part. The silicon wire waveguide has a linear portion led to at least one of the upper surface side or lower surface side region of the light-receiving part through the light input part, and a spiral portion continuous to the linear portion and arranged spirally in the region.SELECTED DRAWING: Figure 2 |
