发明名称 TRENCH TYPE INSULATED GATE BIPOLAR TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To allow for suppression of bounce of the peak value of a collector current when a trench type insulated gate bipolar transistor is turned on.SOLUTION: A trench type insulated gate bipolar transistor includes trenches 10a, 10b, ...10e, ... formed on the surface of a first conductivity type drift layer 1, a plurality of gate electrodes 12a, 12b, 12c, ... provided selectively on the inside of the tranches 10a, 10b, ...10e, ..., insulation blocks 13d, 13e, ... composed of an insulator filling the inside of the trenches 10a, 10b, ...10e, ..., between the adjoining gate electrodes 12a, 12b, 12c, ..., and a second conductivity type collector region 6 formed on the surface of the first conductivity type drift layer 1 on the opposite side from the trenches 10a, 10b, ...10e, ...SELECTED DRAWING: Figure 1
申请公布号 JP2016063048(A) 申请公布日期 2016.04.25
申请号 JP20140189240 申请日期 2014.09.17
申请人 FUJI ELECTRIC CO LTD 发明人 MITAMURA NAOKI
分类号 H01L29/739;H01L21/336;H01L29/06;H01L29/78 主分类号 H01L29/739
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