| 摘要 |
PROBLEM TO BE SOLVED: To shorten convergence time of a matching device.SOLUTION: A matching device is configured to include a directional coupler for detecting a traveling wave and a reflection wave, a matching circuit having a variable element of capacitance or inductance, a control part for calculating a reflection coefficient on the basis of a traveling wave and a reflection wave detected by the directional coupler, and calculates a renewal value of capacitance or inductance of the variable element, and a storage part for storing the reflection coefficient and a rotation coefficient for rotating the reflection coefficient on a Smith chart with associating those coefficients, where the control part calculates a reflection coefficient the basis of on the traveling wave and the reflection wave, obtains a rotation coefficient corresponding to the calculated reflection coefficient, and calculates a renewal value of capacitance or inductance of the variable element on the basis of the calculated reflection coefficient and obtained rotation coefficient.SELECTED DRAWING: Figure 1 |
