DETECTION DEVICE, CONTROL APPARATUS, DETECTION METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To improve delay in measurement of a position of an optical beam spot.SOLUTION: A detection device according to the present invention includes: a two-dimensional area sensor for detecting intensity of an incident optical beam spot; reading means for reading out a signal of an entire range or a signal of a narrow range including a center portion and narrower than the entire range from the two-dimensional area sensor and outputting the read signal as sensor data; position calculation means including first calculation means for calculating a position of the optical beam spot in the two-dimensional area sensor on the basis of the sensor data of the entire range and second calculation means for calculating a position of the optical beam spot in the two-dimensional area sensor on the basis of the sensor data of the narrow range; and calculation switching means for switching operation of the reading means and that of the position calculation means on the basis of the position of the optical beam spot which is a calculation result of the position calculation means.SELECTED DRAWING: Figure 2