| 摘要 |
PROBLEM TO BE SOLVED: To obtain a highly reliable terminal connection structure, a heating apparatus, and an electrostatic chuck device.SOLUTION: A terminal connection structure includes a strip wiring, and a connection terminal arranged at an end of the wiring. The connection terminal has a circular surface facing the end, and is welded to the end by three or more weld zones. The weld zones are arranged in line symmetry with respect to the axis of symmetry in the extensin direction of the wiring and passing the center of the opposite surface, and arranged at two or more positions on the extensin direction of the wiring, and at one or more positions on the opposite side, for a reference axis passing the center of the opposite surface and perpendicular to the axis of symmetry.SELECTED DRAWING: Figure 4 |
