发明名称 GRAPHENE WIRING AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a wiring using low resistance graphene and a manufacturing method of the same.SOLUTION: The graphene wiring includes: a graphene interlayer compound having multilayer graphene formed by laminating graphene sheets and an interlayer material between interlayers of multilayer graphene; and an interlayer crosslinking layer connected to a side face of the multilayer graphene. The interlayer crosslinking layer has a crosslinking molecular structure composed of a plurality of bonded molecules for crosslinking the graphene sheets of the multilayer graphene.SELECTED DRAWING: Figure 1
申请公布号 JP2016063096(A) 申请公布日期 2016.04.25
申请号 JP20140190566 申请日期 2014.09.18
申请人 TOSHIBA CORP 发明人 MIYAZAKI HISAO;SAKAI TADASHI;YAMAZAKI YUICHI;KATAGIRI MASAYUKI
分类号 H01L21/28;C01B31/02 主分类号 H01L21/28
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