发明名称 |
GRAPHENE WIRING AND MANUFACTURING METHOD OF THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a wiring using low resistance graphene and a manufacturing method of the same.SOLUTION: The graphene wiring includes: a graphene interlayer compound having multilayer graphene formed by laminating graphene sheets and an interlayer material between interlayers of multilayer graphene; and an interlayer crosslinking layer connected to a side face of the multilayer graphene. The interlayer crosslinking layer has a crosslinking molecular structure composed of a plurality of bonded molecules for crosslinking the graphene sheets of the multilayer graphene.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016063096(A) |
申请公布日期 |
2016.04.25 |
申请号 |
JP20140190566 |
申请日期 |
2014.09.18 |
申请人 |
TOSHIBA CORP |
发明人 |
MIYAZAKI HISAO;SAKAI TADASHI;YAMAZAKI YUICHI;KATAGIRI MASAYUKI |
分类号 |
H01L21/28;C01B31/02 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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