| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer prober device which enhances the accuracy of characteristic inspection, by preventing variation or fluctuation of the characteristics caused by the pressure or temperature.SOLUTION: A stage 105 includes a mounting surface 1 for mounting a wafer, a mounting area 2, a suction part 3 for sucking a wafer, a suction hole 4, a tube connection hole, a first atmosphere open groove 6 for releasing the air between the stage 105 and a wafer into the atmosphere, a coupling part 7, and a first atmosphere connection hole 8. A plane constituted by the upper surface of the stage 105 is the mounting surface 1. The mounting surface 1 is a portion for mounting a wafer in the manufacturing process of a semiconductor. A portion of the mounting surface 1, being covered by the wafer in the mounted state is the mounting area 2.SELECTED DRAWING: Figure 2 |
