| 摘要 |
PROBLEM TO BE SOLVED: To suppress only deflection of a substrate mounting sectio, in substrate transfer device capable of multistage bulk transfer.SOLUTION: A substrate transfer device for transferring a plurality of substrates in bulk includes a plurality of substrate mounting sections arranged, at intervals, in the height direction, and capable of mounting a plurality of substrates simultaneously, a substrate mounting section holder for holding the plurality of substrate mounting sections integrally, and a movement mechanism coupled with the substrate mounting section holder, and moving the plurality of substrate mounting sections integrally. The movement mechanism includes a first arm having a first support being supported externally, and coupled with one end of the substrate mounting section holder in the longitudinal direction, a second arm having a second support being supported externally, and coupled with the other end of the substrate mounting section holder in the longitudinal direction, and a coupling section for coupling the first arm and second arm.SELECTED DRAWING: Figure 3 |
