| 摘要 |
PROBLEM TO BE SOLVED: To stably and inexpensively produce p type ZnO fine particles.SOLUTION: The upper side of a chamber 10 is connected with a plasma torch 20 of generating plasma by high frequency induction coupling. The upper face of the plasma torch 20 is provided with a plurality of gas feed nozzles 21 for feeding gas to the inside of the plasma torch 20. On the other hand, the plasma torch 20 is also provided with a nozzle 23 for feeding particles. Zinc(Zn) particles A are fed therefrom. The Zn particles A are exposed into high temperature plasma P. In this way, nitrogen-doped ZnO fine particles B are generated in the plasma P. Since electrodes are not present in the plasma torch 20 by the constitution of figure 1, the problem of the consumption of electrons is not generated. Further, the intrusion of impurities from the electrodes to the ZnO fine particles B is not generated as well.SELECTED DRAWING: Figure 1 |
