SEMICONDUCTOR DEVICE INCLUDING A CAPACITOR AND METHOD OF FABRICATING THE SAME

摘要

A semiconductor device with improved reliability according to the embodiment of the present invention includes a lower structure, a lower electrode arranged on the lower structure, a dielectric layer which conformally covers the surface of the lower electrode, an upper electrode which conformally covers the surface of the dielectric layer, and a barrier layer arranged on the upper electrode. A space surrounded by the upper electrode and the barrier layer can be provided on a lateral part of the lower electrode.