发明名称 DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
摘要 Disclosed is a display substrate capable of reducing dangling bonds to prevent a fault caused thereby. The display substrate includes a base substrate, a gate pattern, an active pattern, and a data pattern. The gate pattern includes a gate electrode disposed on the base substrate. The active pattern overlaps the gate electrode. The active pattern includes a first active layer, a second active layer, and a third active layer. The first active layer includes amorphous silicon (a-Si:H). The second active layer is disposed on the first active layer and includes amorphous silicon of which a concentration of hydrogen is higher than that of the first active layer. The third active layer is disposed on the second active layer and includes amorphous silicon of which a concentration of hydrogen is substantially the same as that of the first active layer. The data pattern is disposed on the active pattern and includes source and drain electrodes spaced apart from each other. Therefore, the dangling bond of an upper surface of the active layer can be decreased, and a fault due to the decrease of dangling bond can be prevented. Thus, a defective display of the display apparatus can be prevented.
申请公布号 KR20160044168(A) 申请公布日期 2016.04.25
申请号 KR20140138569 申请日期 2014.10.14
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 AHN, TAE YOUNG;OH, JI HOON
分类号 H01L27/32 主分类号 H01L27/32
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