METHOD FOR CONTROLLING MEMS VARIABLE CAPACITOR AND INTEGRATED CIRCUIT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for controlling an MEMS (Micro Electro Mechanical Systems)variable capacitor, enabling a desired capacitance to be obtained.SOLUTION: A method related to an embodiment is a method for controlling an MEMS variable capacitor which has first and second electrodes, and of which the capacitance is changed according to a voltage applied between the first and second electrodes. The method includes: a step (S11) of applying a voltage between the first and second electrodes; a step (S12) of evaluating whether or not a capacitance of the MEMS variable capacitor satisfies a prescribed condition with a voltage being applied between the first and second electrodes; and a step (S14) of determining the voltage applied between the first and second electrodes as a voltage to be applied between the first and second electrodes when it is evaluated that the capacitance of the MEMS variable capacitor satisfies the prescribed condition.SELECTED DRAWING: Figure 4