MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic light emitting element, preventing members constituting an organic light emitting element from being damaged and forming a protective layer less in defects, by performing cleaning using a water-containing liquid.SOLUTION: A manufacturing method of an organic light emitting element includes the steps of: forming a lower electrode; forming an organic compound layer on the lower electrode; forming an upper electrode on the organic compound layer; forming a first protective layer on the upper electrode layer; and a forming a second protective layer on the first protective layer. The manufacturing method is characterized in that a step of cleaning at least one of the organic compound layer, the upper electrode and the first protective layer using a water-containing liquid is included after the step of forming the organic compound layer.SELECTED DRAWING: Figure 1