| 摘要 |
PROBLEM TO BE SOLVED: To improve bonding reliability and manufacturing easiness of a piezoelectric vibrator having a structure in which a piezoelectric chip 20 having a frame part 24, a base 40, and a lid 60 are bonded each other.SOLUTION: A piezoelectric vibrator 10 includes a piezoelectric chip having a vibration part 22, a frame part 24, a coupling part 26, a through part 28, an excitation electrode 30, and an extraction electrode 32, a base 40 bonded to one surface of the piezoelectric chip, and a lid 60 bonded to the other surface of the piezoelectric chip. The base 40 of the piezoelectric vibrator 10 includes a connection pad 42 provided on a first surface on the piezoelectric chip side, an external mounting terminal 44 provided on a second surface opposite to the first surface, and a veer wiring 46 passing through the base for connecting the connection pad and the external mounting terminal. The connection pad 42 is connected to the extraction electrode 32 by a conductive adhesive 70.SELECTED DRAWING: Figure 1 |
