| 摘要 |
Provided is a workpiece bonding method that is capable of achieving a high strength bonded state and with which good reproducibility of the bonded state is obtained. This workpiece bonding method for bonding two workpieces, each of which is obtained from a material selected from a group consisting of synthetic resins, glass, silicon wafers, quartz and sapphire, is characterized: in comprising a surface activation step for activing the bonding surface of at least one of the workpieces, and a lamination step for laminating the two workpieces so that the respective bonding surfaces contact each other; and in performing a pre-treatment step for removing moisture from the bonding surfaces of the workpieces submitted to the surface activation step before performing said surface activation step. |
