INDICATOR FOR DETECTION OF PLASMA PROCESSING

摘要

[Problem] To provide an indicator for the detection of plasma processing that avoids (or prevents) the generation of minute fiber pieces and colored pigment in a blown powder state from a substrate during plasma processing and is not influenced by the chromaticity of a measurement location during color measurement after plasma processing. [Solution] An indicator for the detection of plasma processing in which a part or the entirety of the surface of a substrate is at least laminated with a color changing layer that changes color in a plasma processing atmosphere, said indicator being characterized in that (1) the substrate is a transparent synthetic resin substrate and (2) the rear surface of the substrate has a colored layer.