发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of obtaining a good-quality graphene film.SOLUTION: A semiconductor device according to an embodiment comprises: a first film 14 that has a first melting point; a second film 15 that is provided on an upper surface of the first film, and that has a second melting point lower than the first melting point, and that functions as a catalyst for growing graphene, and that has a lateral face prescribing a step; and a graphene film 17 provided on the upper surface of the first film, and contacted with the lateral face of the second film.SELECTED DRAWING: Figure 4
申请公布号 JP2016058621(A) 申请公布日期 2016.04.21
申请号 JP20140185307 申请日期 2014.09.11
申请人 TOSHIBA CORP 发明人 WADA MAKOTO;KITAMURA MASAYUKI;YAMAZAKI YUICHI;KAJITA AKIHIRO;ISOBAYASHI ATSUNOBU;SAITO TATSURO;ISHIKURA TAISHI;SAKATA ATSUKO;SAKAI TADASHI
分类号 H01L21/3205;C01B31/02;H01L21/285;H01L21/768;H01L23/532 主分类号 H01L21/3205
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