MICROPHONE AND METHOD OF MANUFACTURING THE SAME

摘要

A microphone and a method of manufacturing thereof are provided. The microphon includes a substrate that includes a penetration aperture, a vibration membrane disposed over the substrate and covering the penetration aperture, and a fixed electrode disposed over the vibration membrane, separated from the vibration membrane, and including a plurality of air inlets. The vibration membrane includes a first sub-vibration membrane disposed over the substrate and covering the penetration aperture and includes a plurality of first slots and a second sub-vibration membrane disposed over the first sub-vibration membrane, connected to the first sub-vibration membrane, and including a connection unit and a plurality of second slots. The first sub-vibration membrane is flexible, and the second sub-vibration membrane is rigid.

主权项

1. A microphone, comprising:
a substrate including a penetration aperture; a vibration membrane disposed over the substrate and covering the penetration aperture; and a fixed electrode disposed over the vibration membrane, separated from the vibration membrane, and having a plurality of air inlets, wherein the vibration membrane includes:
a first sub-vibration membrane disposed over the substrate and covering the penetration aperture and having a plurality of first slots, anda second sub-vibration membrane disposed over the first sub-vibration membrane, connected to the first sub-vibration membrane, and having a connection unit and a plurality of second slots,wherein, the first sub-vibration membrane has flexibility, and the second sub-vibration membrane has rigidity.