发明名称 IMAGE PROCESSING METHOD, SYSTEM AND APPARATUS
摘要 An image processing method is disclosed. An impulse response of a source of an interferometer system is received. An impulse response of a detector of the interferometer system is received. The source impulse response is determined independently of the detector impulse response. An image of an object generated by a grating of the interferometer system is captured, the image is captured by the detector of the interferometer system. The captured image is processed using the determined detector impulse response to attenuate artefacts introduced by the detector. The processed image is demodulated to produce a demodulated image, artefacts introduced by the source being present in the demodulated image. The demodulated image is processed using the source impulse response to reduce the artefacts in the demodulated image introduced by the source.
申请公布号 US2016109387(A1) 申请公布日期 2016.04.21
申请号 US201514884570 申请日期 2015.10.15
申请人 CANON KABUSHIKI KAISHA 发明人 PAN RUIMIN
分类号 G01N23/04 主分类号 G01N23/04
代理机构 代理人
主权项 1. An image processing method comprising: receiving an impulse response of a source of an interferometer system; receiving an impulse response of a detector of the interferometer system, the source impulse response being determined independently of the detector impulse response; capturing an image of an object generated by a grating of the interferometer system, the image being captured by the detector of the interferometer system; processing the captured image using the determined detector impulse response to attenuate artefacts introduced by the detector; demodulating the processed image to produce a demodulated image, artefacts introduced by the source being present in the demodulated image; and processing the demodulated image using the source impulse response to reduce the artefacts in the demodulated image introduced by the source.
地址 Tokyo JP