| 摘要 |
PROBLEM TO BE SOLVED: To regulate a mask pattern after OPC with a less amount of pieces of data.SOLUTION: A support device 100 acquires design data. The support device 100 classifies plural wirings into plural groups, so that, out of the plural wirings, wirings existing in an affection range of a light proximity effect among the wirings are in the same group. The support device 100 specifies a combination of groups in which, a shape of respective wirings of plural wirings belonging to the respective groups and a physical relationship among the wirings match, between the groups. The support device 100, therefore, can specify the combination in which, the shape of respective wirings belonging to the respective groups, after OPC and the physical relationship among the wirings match, between groups, even when OPC is performed, and a shape of respective wirings of plural wirings belonging to the respective groups is changed.SELECTED DRAWING: Figure 1 |
