| 摘要 |
PROBLEM TO BE SOLVED: To provide a pyroelectric sensor capable of improving absorption efficiency of infrared and reducing warp of a pyroelectric material and a method for manufacturing the same.SOLUTION: A pyroelectric sensor includes: a pyroelectric material 11; an upper surface electrode 13 that is formed on the upper surface of the pyroelectric material 11 and takes out a signal; a first infrared absorption film 14 that is formed on the upper surface of the upper surface electrode 13 and absorbs infrared; a lower surface electrode 15 that is formed on the lower surface of the pyroelectric material 11 and takes out a signal; a second infrared absorption film 16 that is formed on the lower surface of the lower surface electrode 15 and absorbs infrared; and a holding base 12 for holding the pyroelectric material 11.SELECTED DRAWING: Figure 1 |
